| Jahr | 0 - 500 kW | 500 kW - 1 MW | 1 - 2 MW | 2 - 3 MW | 3 - 4 MW | 4 - 5 MW | >= 5 MW |
|---|---|---|---|---|---|---|---|
| 2000 | 13.25 | 56.63 | 8.43 | 21.69 | 0 | 0 | 0 |
| 2001 | 11.96 | 51.09 | 7.61 | 29.35 | 0 | 0 | 0 |
| 2002 | 6.32 | 27.01 | 4.02 | 62.64 | 0 | 0 | 0 |
| 2003 | 4.15 | 17.74 | 2.64 | 75.09 | .38 | 0 | 0 |
| 2004 | 3.24 | 14.41 | 2.06 | 77.65 | 2.35 | .29 | 0 |
| 2005 | 2.97 | 13.24 | 1.89 | 71.35 | 10.27 | .27 | 0 |
| 2006 | 2.74 | 12.19 | 1.74 | 65.92 | 17.16 | .25 | 0 |
| 2007 | 2.14 | 9.55 | 1.56 | 61.01 | 25.15 | .19 | .39 |
| 2008 | 1.94 | 7.92 | 1.29 | 60.26 | 22.13 | 5.98 | .48 |
| 2009 | 1.33 | 5.92 | 1.33 | 56.28 | 29.59 | 4.47 | 1.09 |
| 2010 | .96 | 3.91 | 1.75 | 46.01 | 42.74 | 2.95 | 1.67 |
| 2011 | .85 | 3.48 | 2.2 | 44.35 | 42.29 | 2.63 | 4.19 |
| 2012 | .97 | 2.65 | 1.68 | 34.85 | 51.79 | 2.06 | 6.01 |
| 2013 | .78 | 2.13 | 1.78 | 30.55 | 55.02 | 1.65 | 8.08 |
| 2014 | .66 | 1.78 | 1.49 | 25.96 | 61.7 | 1.38 | 7.03 |
| 2015 | .49 | 1.35 | 1.81 | 20.19 | 60.25 | 5.08 | 10.82 |
| 2016 | .43 | 1.17 | 2.22 | 17.49 | 54.74 | 11.73 | 12.23 |
| 2017 | .14 | .98 | 1.86 | 16.26 | 48.07 | 13.1 | 19.59 |
| 2018 | .12 | .86 | 1.65 | 14.38 | 44.1 | 15.47 | 23.41 |
Gefördert vom Bundesministerium für Wirtschaft und Energie aufgrund eines Beschlusses des Deutschen Bundestages